Confocal Microscope

Make / Model: Leica - INM100

Confocal Microscope
The Leica INM100 is a universal inspection microscope for the semiconductor and microelectronics industry. The microscope's most impressive features are its ultra high optical performance, ergonomy and easy operation. The use of different imaging modes (brightfield, darkfield, differential interference contrast and confocal mode) makes it easier for inspecting samples and locating defects.

With the confocal module, enhanced contrast, higher resolution and limited depth of field can be achieved. Inspection of multi-layer structure can greatly benefit from this feature. The microscope has a manual stage with the capability of holding 8-inch wafer. Inspection of samples can be made more convenient.
Equipment Specifications

1) Imaging mode: Brightfield
Differential Interference Contrast (DIC)
2) Objective lens: 2.5x, 5x, 10x, 20x, 50x, 100x
(long working distance)
3) Eyepiece magnification: 10x
4) Automated functions: Aperture selection, motorized revolving nosepiece
5) Stage: Rapid positioning manual stage (with 8-inch wafer holder)

Digital camera - Leica DC300
1) CCD pixel resolution: 2048 x 1526 pixels
2) Color depth: 36 bit RGB
3) Exposure time: 1/10000 second to 2 seconds

Image management software - Leica IM1000
1) Software modules: Image assembly, multifocus and measurement modules

Example photos: (Integrated circuits in 0.18 um technology, both photos focused on top metal layer)
Photo taken in brightfield mode
Photo taken in brightfield mode
Photo taken in confocal mode
Photo taken in confocal mode

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