Laser Cutting System
Make / Model: New Wave Research LCS 4/EzLaze
Laser Cutting System
The New Wave Research Ezlaze Trilite System is a compact Nd:YAG laser system operating on specially modified Mitutoyo FS-60 microscope, mainly used for trimming and performing miniaturized surgery on an IC surface. The system provides variable laser energy settings (up to 2 mJ range), objective lens magnifications (10x, 20x, 50x and 100x) and three selectable wavelengths (1064 nm, 532 nm and 355 nm) to allow for optimizations of different surgical needs and for various semiconductor materials to be removed.
Equipment Specifications
1) Laser type: Pulsed, air cooled Nd:YAG, Class IIIb
2) Wavelength: 1064 nm, 532 nm & 355 nm
3) Maximum energy: 2.0 mJ @ 1064 nm
2.0 mJ @ 532 nm
2.0 mJ @ 355 nm
4) Objective lens: 10x, 20x, 50x & 100x
5) Eye piece magnification: 10x
6) Aperture range (Max):

                             (Min):
50 um × 50 um with 50x objective lens
25 um × 25 um with 100x objective lens
2 um × 2 um with 100x objective lens @ 1064 nm
2 um × 2 um with 50x objective lens
7) Pulse rate: Single shot or
1 Hz in continuous mode, or
5 Hz in burst mode for 10 seconds (18-second rest required after each burst)
8) Illumination system: 150 watt halogen light illumination source with fiber delivery

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Rev02(25 Feb 2002)